A 0.35 mm Silicon Carbide Diffractive Waveguide with Dual Parameter Apodization for Full Color Augmented Reality

RESUMO

Augmented reality eyewear offers a transformative interface poised to reshape human information interaction. In this context, silicon carbide (SiC) offers unique advantages for diffractive waveguides with its high refractive index and excellent thermal conductivity. However, in single-layer full-color displays, existing SiC waveguides generally remain thicker than 0.5 mm to reduce the bounce count of total internal reflection, thereby avoiding severe spatial variations in luminance and color. Here, we demonstrate a 0.35 mm SiC diffractive waveguide with an ultra-lightweight of only 1.98 g. The challenge of spatial non-uniformity is addressed by dual-parameter apodized gratings with continuously varying depth and duty cycle, enabling fine spatial control over local diffraction efficiency. To realize high-throughput production, a parallel gradient transfer method compatible with nanoimprint lithography is introduced, enabling wafer-scale patterning of four lens pairs per 8-inch SiC wafer. Furthermore, magnesium fluoride planarization suppresses grating visibility and achieves a high see-through transmittance of 92%. Optical simulations confirm that this architecture achieves balanced full-color transmission across a 30-degree field of view. This strategy provides a scalable route toward ultra-light and visually unobtrusive glasses, opening new opportunities for practical consumer-grade wearable displays.