A magneto-mechanical gyroscope with spintronic readout

RESUMO

Gyroscopes are essential elements in navigation, consumer electronics, robotics, and aerospace applications. Most micro electro-mechanical systems (MEMS) implementations rely on capacitive sensing mechanisms, which limit the dimensional scaling to the micrometer scale. In this work, we introduce a MEMS-like two-degree-of-freedom (2-DOF) gyroscope that exploits the rectification functionality of magnetic tunnel junctions (MTJs) as its readout mechanism and as the transducer of the mechanical dynamics. Experimentally characterized MTJs have been used to calibrate and perform an experiment-informed design of the magneto-mechanical model combining micromagnetic theory with 2-DOF mechanical equations. We demonstrated that the output is linear with angular rate, and that the proposed device is able to extract the angular rate in dynamic cases exploiting a homodyne demodulation approach. The results open a path towards a compact, complementary metal-oxide semiconductor (CMOS)-compatible readout pathway that relaxes reliance on tight capacitive gaps and motivates multi-physics designs of the device.